研发能力与服务
CMOS MEMS设计与制造
硅和高聚物集成MEMS结构
热发泡执行器设计，带主动控制和感测功能
射流卡盘设计，与MEMS芯片集成
射流形成与优化
微流体系统设计、集成与制造
R & D capabilities and services
CMOS-MEMS design and manufacturing
Silicon and polymer integrated MEMS structure
TIJ actuator design, with active control and sensing functions
Jet chuck design, integrated with MEMS chip
Jet formation and optimization
Design, integration and manufacturing of microfluidics systems
应用领域
- 工业打码
- 数字印刷
- 砂型打印
- 数字印染
- 电子打印
application area
- Industrial coding
- Digital printing
- Sand mold printing
- Digital printing and dyeing
- Electronic printing
创新研发
- 兼容CMOS的MEMS工艺
- 片上闭环温度控制，以准确控制流量
- 热发泡泵：支持低成本片上执行
- 喷墨型喷射器，可控制数字给药装置的滴量（3-5μm）
- 灵活的射流系统流体化学与集成
- 共性、模块性和可扩展性
Innovative R & D
- CMOS compatible MEMS process
- On chip closed-loop temperature control to accurately control the flow
- Thermal foaming pump: support low-cost on-chip execution
- Inkjet ejector, which can control the drop amount of digital drug delivery device (3-5) μ m）
- Fluid chemistry and integration of flexible jet system
- Commonness, modularity and scalability
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